Recent Patents and Applications for MEMS

by BOARD OF REGENTS UNIV OF TEXAS SYSTEM ; NORTHEASTERN UNIV on May 17, 2018 at 12:00 pm

A microelectromechanical resonant circulator device is providing, having a substrate, and at least three electrical ports supported on the substrate. At least three electromechanical resonator elements are connected with associated switch elements and an associated port. The switch elements are […]

by ANALOG DEVICES INC on May 17, 2018 at 12:00 pm

Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one […]

by INFINEON TECHNOLOGIES AG on May 17, 2018 at 12:00 pm

Eine Sensorvorrichtung enthaelt eine Sensoreinheit, die fuer eine Eigenschaft eines gasfoermigen Mediums sensitiv ist. Die Sensoreinheit ist auf einer ersten Oberflaeche eines Sensorsubstrats ausgebildet. Eine Rahmenstruktur auf der ersten Oberflaeche umfasst einen ersten Schleifenbereich, der […]

by YOKOGAWA ELECTRIC CORP on May 17, 2018 at 12:00 pm

Ein Vibrationswandler umfasst ein Siliziumsubstrat, einen ersten Oxidfilm, der auf dem Siliziumsubstrat ausgebildet ist, eine Aktivierschicht, die auf dem ersten Oxidfilm ausgebildet ist, einen zweiten Oxidfilm, der auf der Aktivierungsschicht ausgebildet ist, eine Polysiliziumschicht, die an dem […]

by AMKOR TECHNOLOGY INC on May 17, 2018 at 12:00 pm

Disclosed is a semiconductor device including a conductive shield layer formed within a cavity of a molding part and a manufacturing method thereof. Various aspects of the present invention, for example and without limitation, includes a semiconductor device including a conductive shield layer […]

by INTEL CORP on May 17, 2018 at 12:00 pm

Apparatuses, systems, and methods associated with placement of magnets within a microelectromechanical system device are disclosed herein. In embodiments, a method of affixing at least one magnet in a microelectromechanical system, may include affixing an electromagnetic actuator to a base […]

by OBSIDIAN SENSORS INC ; QUALCOMM INC on May 17, 2018 at 12:00 pm

This disclosure provides devices and methods for 3-D device packaging with backside interconnections. One or more device elements can be hermetically sealed from an ambient environment, such as by vacuum lamination and bonding. One or more via connections provide electrical interconnection from a […]

by SENSATA TECHNOLOGIES INC on May 16, 2018 at 12:00 pm

A MEMS sensor 100 including a housing 102 defining an interior 104 and an inlet in fluid communication with an environment for sensing, a sensing die 116 coupled to the housing 102 for generating a signal based on the environment, an encapsulant 124 is applied to the sensing die 116 to protect the […]

by EAGLE TECHNOLOGY LLC on May 15, 2018 at 12:00 pm

An improved microelectromechanical device includes an upper plate, a lower plate, and a spacing structure. The upper plate includes a first surface and an opposite second surface. The lower plate is spaced from the upper plate. The lower plate includes a third surface that faces the first surface […]

by MICROSOFT TECHNOLOGY LICENSING LLC on May 15, 2018 at 12:00 pm

A near-eye optical display system utilizes a compact display engine that couples image light from an imager to a waveguide-based display having diffractive optical elements (DOEs) that provide exit pupil expansion in two directions. The display engine comprises a pair of single axis MEMS (Micro […]